NACHI-FUJIKOSHI CORP.
Industrial Furnaces and Coating
Main text
SH-4-8: Standard ion plating equipment
Specifications
| Type of coating (*1) (coating thickness) |
TiN, TiCN, VC(*2) (2-4 µm (Max. 5 µm)) "cronion"(*2) (3-6 µm (Max. 7 µm)) |
|---|---|
| Processing temperature | Approx. 400-500°C in the final coating process |
| Effective dimensions for processing | 170 mm (diameter) x 320 mm (height) x 8 (spindles) |
| Processing items volume (including jig/per spindle) |
Max. 10 kg during rotation and revolution Max. 15 without rotation and revolution |
| Structural devices | Coating equipment (main unit), exhaust pump, power supply, control unit, control computer, hot water tank |
| Utilities | Power, cooling water, Ar gas, nitrogen gas (raw material), nitrogen gas (for cooling), compressed air, vaporized metal |
| Options | Jigs, cleaning equipment, meter for measuring coating thickness, scratch tester, demagnetizer, leak detector |
(*1) Either TiN or cronion coating formation software is included with the equipment.
(*2) TiCN coating and VC coating are optional.
layout drawing
