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コーティング装置
■MVP搭載DLCコーティング装置 SMVP-1020
● MVP法*による高密度プラズマで細穴の内面までコーティング
従来の技術では困難であった細穴内面のコーティングを実現し、Ø30mm×500Lmm やØ3mm×100Lmmなどの小径穴内部への成膜品質を確保する。
＊ＭＶＰ(Microwave-sheath Voltage combination Plasma)とは、マイクロ波を利用した成膜技術です。
● コンパクトながら高速外面コーティングで従来と変わらない量産性能
MVP法による高密度プラズマにより、外面コーティングでは最大150µm/hの超高速成膜を実現。標準的な アーク法やスパッタ法による従来機と比較して、成膜速度が30 倍から最大150 倍程度まで向上。
● 少数、多品種にも対応
当社従来機より処理時間を大幅に短縮し、処理条件の切替えも容易なため、少量・多品種の処理に柔軟に対応。また、コンパクトな設計で、２台設置し交互運転することで生産効率がさらに向上。
内面コーティングの成膜事例
配管、継手・バルブ、ノズルなどの内面コーティング、プランジャガイド
軸受外輪内面、直動アクチュエータのオネジ・メネジ、オイルホール粉末成型金型の内面コーティング、射出成型機用ブッシュなど
仕様
※1 標準配置図状態での寸法です。
※2 本体、制御盤、電源盤、ポンプ等の総重量です。
成膜可能膜種
配置図
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